Ultrafast Laser Processing for High-Aspect-Ratio Structures

Abstract

Over the past few decades, remarkable breakthroughs and progress have been achieved in ultrafast laser processing technology. Notably, the remarkable high-aspect-ratio processing capabilities of ultrafast lasers have garnered significant attention to meet the stringent performance and structural requirements of materials in specific applications. Consequently, high-aspect-ratio microstructure processing relying on nonlinear effects constitutes an indispensable aspect of this field. In the paper, we review the new features and physical mechanisms underlying ultrafast laser processing technology. It delves into the principles and research achievements of ultrafast laser-based high-aspect-ratio microstructure processing, with a particular emphasis on two pivotal technologies: filamentation processing and Bessel-like beam processing. Furthermore, the current challenges and future prospects for achieving both high precision and high aspect ratios simultaneously are discussed, aiming to provide insights and directions for the further advancement of high-aspect-ratio processing.