Author:
Yang Po-Hui,Chang Ying-Sheng,Chan Che-Tsung
Abstract
In this study, we deposited zinc oxide (ZnO) and aluminum-doped zinc oxide (AZO) on the electroless nickel immersion gold (ENIG) of a flexible printed circuit board (FPCB) as a potentiometric pH sensor. The sensing films of the pH sensor were fabricated by a radio frequency (RF) sputtering system and analyzed by field emission scanning electron microscope (FE-SEM) and X-ray photoelectron spectroscopy (XPS). In the pH 2 to 10 buffer solutions, it was observed that the characteristics of the pH sensor through the voltage–time (V-T) measurement system include average sensitivity and linearity, drift effect, and repeatability. According to the experimental results, the pH sensors in this study could exhibit good characteristics.
Subject
Physical and Theoretical Chemistry,Analytical Chemistry
Cited by
9 articles.
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