Author:
Li Duo,Li Na,Su Xing,Liu Kan,Ji Peng,Wang Bo
Abstract
A multi-aperture atmospheric pressure plasma processing (APPP) method was proposed to structure the continuous phase plate (CPP). The APPP system was presented and removal investigation showed the removal function of APPP was of a high repeatability and robustness to the small disturbance of gas flows. A mathematical model for the multi-aperture structuring process was established and the simulation analysis indicated the advantages of the proposed method in terms of balancing the efficiency and accuracy of the process. The experimental results showed that multi-aperture APPP has the ability to structure a 30 mm × 30 mm CPP with the accuracy of 163.4 nm peak to valley (PV) and 31.7 nm root mean square (RMS).
Funder
National Natural Science Foundation of China
National Science and Technology Major Project
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Cited by
4 articles.
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