Figuring Method of High Convergence Ratio for Pulsed Ion Beams Based on Frequency-Domain Parameter Control

Abstract

The continuous phase plate (CPP) provides excellent beam smoothing and shaping impacts in the inertial confinement fusion application. However, due to the features of its dispersion, its surface gradient is frequently too large (>2 μm/cm) to process. When machining a large gradient surface with continuous ion beam figuring (IBF), the acceleration of the machine motion axis cannot fulfill the appropriate requirements, and the machining efficiency is further influenced by the unavoidable extra removal layer. The pulsed ion beam (PIB) discretizes the ion beam by incorporating frequency-domain parameters, resulting in a pulsed beam with a controlled pulse width and frequency and avoiding the extra removal layer. This research evaluates the processing convergence ability of IBF and PIB for the large gradient surface using simulation and experiment. The findings reveal that PIB offers obvious advantages under the same beam diameter. Compared with the convergence ratio (γ = 2.02) and residuals (RMS = 184.36 nm) of IBF, the residuals (RMS = 27.48 nm) of PIB are smaller, and the convergence ratio (γ = 8.47) is higher. This work demonstrates that PIB has better residual convergence in large gradient surface processing. It is expected to realize ion beam machining with a higher convergence ratio.