1. State Key Laboratory of Transducer Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2. College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
3. School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454000, China
4. School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China