Abstract
In this paper, we demonstrate 3D-printed 1-DOF (one torsional axis; 1 degree of freedom) optical scanners with large mirror areas (up to 20 × 20 mm2). Each device consists of an aluminum-coated square silicon substrate serving as the mirror, two miniature permanent magnets, an electromagnet, and a 3D-printed structure including the mirror frame, torsion springs, and base. One device can reach a static half optical scan angle of 14.8 deg., i.e., a full optical scan angle of 29.6 deg., at 12 VDC; this particular device exhibits a mechanical resonance frequency of 84 Hz. These scanners can be a potential, low-cost alternative to the expensive conventional galvanometer scanners.
Funder
Ministry of Science and Technology of Taiwan
Subject
Radiology, Nuclear Medicine and imaging,Instrumentation,Atomic and Molecular Physics, and Optics
Reference27 articles.
1. Advances and technologies of galvanometer-based optical scanners;Aylward;Proceedings of the SPIE’S International Symposium on Optical Science, Engineering, and Instrumentation,1999
2. Laser scanners with oscillatory elements: Design and optimization of 1D and 2D scanning functions
3. Single-mirror beam steering system: analysis and synthesis of high-order conic-section scan patterns
4. 62xxK and 83xxK Series, Galvanometershttps://novantaphotonics.com/product/62xxk-and-83xxk-series-galvanometers/
5. Galvanometershttps://www.thorlabs.com/navigation.cfm?guide_id=2269
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