Author:
Shen Ching-Kai,Tsui Wei-An,Yeh Pin-Hung,Tsai Cheng-Lin,Cheng Yi-Wen,Tsai Jui-Che
Abstract
In this paper, we have developed a 2D optical scanning module comprising cascaded
3D-printed one-axis rotating mirrors with large areas (30×30mm2 for the X-direction scan and 60×25mm2 for the Y-direction scan). Each
mirror device contains a square or rectangular silicon substrate
coated with aluminum, serving as the mirror. A 3D-printed structure,
including the mirror frame (with four embedded mini permanent magnets
on the backside), torsion springs, and base, is combined with the
mirror; two electromagnets are situated under the mirror as the
actuation mechanism. We apply DC voltage to the electromagnets to
create magnetic force. The electromagnets can interact with the
permanent magnets to make the mirror rotate. The X scan of the 2D
scanning module can achieve a static optical scan angle of ∼11.8deg at the -X corners, and the
corresponding Y-scan angle is ∼4.5deg, both with 12 VDC. Moreover, we have
observed a fan-shaped distortion, a phenomenon not thoroughly studied
previously for combining two single-axis scan mirrors. Therefore, we
also perform a simulation to establish and demonstrate a correlation
between the simulation prediction and experimental results. The 2D
scanning module can be a low-cost alternative to the expensive
conventional galvanometer scanners, and it can be used to upgrade a
rangefinder to a simplified LiDAR.
Funder
National Science and Technology Council