1. Department of Mechanical Engineering, College of Engineering, National Yang-Ming Chiao-Tung University, Hsinchu 30010, Taiwan
2. Mechanical and Mechatronics Systems Research Laboratories, Industrial Technology Research Institute, Hsinchu 31040, Taiwan
3. Department of Material Science and Engineering, College of Engineering, National Yang-Ming Chiao-Tung University, Hsinchu 30010, Taiwan