Abstract
A low noise interface ASIC for micro gyroscope with ball-disc rotor is realized in 0.5µm CMOS technology. The interface circuit utilizes a transimpedance pre-amplifier which reduces input noise. The proposed interface achieves 0.003°/s/Hz1/2 noise density and 0.003°/s sensitivity with ±100°/s measure range. The functionality of the full circuit, including circuit analysis, noise analysis and measurement results, has been demonstrated.
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Cited by
6 articles.
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