High resolution capacitance detection circuit for rotor micro-gyroscope
Author:
Funder
NSFC
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4869239
Reference22 articles.
1. N. Maluf and K. Williams, An Introduction to Microelectromechanical Systems Engineering (Artech House, London, 2004), p.31.
2. The development of micro-gyroscope technology
3. Electrostatically suspended and sensed micromechanical rate gyroscope
4. Electrostatically Levitated Ring-Shaped Rotational-Gyro/Accelerometer
5. Design and fabrication of a micromachined electrostatically suspended gyroscope
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