Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers
Author:
Funder
National Natural Science Foundation of China
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Link
http://www.mdpi.com/2072-666X/9/3/120/pdf
Reference24 articles.
1. The use of metal filled via holes for improving isolation in LTCC RF and wireless multichip packages
2. Characterization of Low-Temperature Cofired Ceramic Tiles as Platforms for Gas Chromatographic Separations
3. LTCC-based microchips for the electrochemical detection of phenolic compounds
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