A Wireless Passive Vibration Sensor Based on High-Temperature Ceramic for Harsh Environment

Abstract

This paper proposes a wireless passive vibration sensor based on high-temperature ceramics for vibration measurement in harsh environments such as automotive and advanced engines. The sensor can be equivalent to an acceleration-sensitive RF LC resonance tank. The structural design of the LC tank and the signal wireless sensing mechanism are introduced in detail. The high-temperature mechanical properties of the sensitive structure are analyzed using ANSYS at 25–400°C, which proves the usability of the vibration sensor in high-temperature environment. The three-dimensional integrated manufacturing of vibration sensors with a beam-mass structure based on high-temperature ceramics is completed by a bonding process. Finally, the performance of the sensor is tested on a built experimental platform, and the results show that the vibration sensitivity is approximately 1.303 mv/m·s-2, and the nonlinear error is approximately 4.3%. The vibration sensor can work normally within 250°C, and the sensitivity is 0.989 mv/m·s-2.