High-Resolution Laser Interference Ablation and Amorphization of Silicon
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Published:2023-08-03
Issue:15
Volume:13
Page:2240
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ISSN:2079-4991
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Container-title:Nanomaterials
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language:en
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Short-container-title:Nanomaterials
Author:
Blumenstein Andreas1, Simon Peter1, Ihlemann Jürgen1ORCID
Affiliation:
1. Institut für Nanophotonik Göttingen e.V., Hans-Adolf-Krebs-Weg 1, 37077 Göttingen, Germany
Abstract
The laser interference patterning of a silicon surface via UV femtosecond pulse irradiation, resulting in 350 nm periodic structures, is demonstrated. The structuring process was performed using a laser with a 450 fs pulse duration at a wavelength of 248 nm in combination with a mask projection setup. Depending on the laser fluence, single-pulse irradiation leads to amorphization, structure formation via lateral melt flow or the formation of voids via peculiar melt coalescence. Through multipulse irradiation, combined patterns of interference structures and laser-induced periodic surface structures (LIPSS) are observed.
Funder
Deutsche Forschungsgemeinschaft
Subject
General Materials Science,General Chemical Engineering
Reference37 articles.
1. Simon, P., Ihlemann, J., and Bonse, J. (2021). Laser-Generated Periodic Nanostructures. Nanomaterials, 11. 2. Rung, S., Bokan, K., Kleinwort, F., Schwarz, S., Simon, P., Klein-Wiele, J.-H., Esen, C., and Hellmann, R. (2019). Possibilities of Dry and Lubricated Friction Modification Enabled by Different Ultrashort Laser-Based Surface Structuring Methods. Lubricants, 7. 3. Hauschwitz, P., Jochcová, D., Jagdheesh, R., Cimrman, M., Brajer, J., Rostohar, D., Mocek, T., Kopeček, J., Lucianetti, A., and Smrž, M. (2020). Large-Beam Picosecond Interference Patterning of Metallic Substrates. Materials, 13. 4. Böker, K.O., Kleinwort, F., Klein-Wiele, J.-H., Simon, P., Jäckle, K., Taheri, S., Lehmann, W., and Schilling, A.F. (2020). Laser Ablated Periodic Nanostructures on Titanium and Steel Implants Influence Adhesion and Osteogenic Differentiation of Mesenchymal Stem Cells. Materials, 13. 5. Blumenstein, A., Garcia, M.E., Rethfeld, B., Simon, P., Ihlemann, J., and Ivanov, D.S. (2020). Formation of Periodic Nanoridge Patterns by Ultrashort Single Pulse UV Laser Irradiation of Gold. Nanomaterials, 10.
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