Three-Dimensional Simulation of DRIE Process Based on the Narrow Band Level Set and Monte Carlo Method-Reference-Cited by-同舟云学术

Three-Dimensional Simulation of DRIE Process Based on the Narrow Band Level Set and Monte Carlo Method

Published:2018-02-09 Issue:2 Volume:9 Page:74
ISSN:2072-666X
Container-title:Micromachines
language:en
Short-container-title:Micromachines

Author:

Yu Jia-Cheng,Zhou Zai-Fa,Su Jia-Le,Xia Chang-Feng,Zhang Xin-Wei,Wu Zong-Ze,Huang Qing-An^ORCID

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering

Link

http://www.mdpi.com/2072-666X/9/2/74/pdf

Reference24 articles.

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2. Level Set Methods and Fast Marching Methods: Evolving Interfaces in Computational Geometry, Fluid Mechanics, Computer Vision, and Materials Science;Sethian,1999

3. A fast marching level set method for monotonically advancing fronts.

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