Laser Scanning Confocal Thermoreflectance Microscope for the Backside Thermal Imaging of Microelectronic Devices-Reference-Cited by-同舟云学术

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Laser Scanning Confocal Thermoreflectance Microscope for the Backside Thermal Imaging of Microelectronic Devices

Published:2017-11-30 Issue:12 Volume:17 Page:2774
ISSN:1424-8220
Container-title:Sensors
language:en
Short-container-title:Sensors

Author:

Kim Dong,Jeong Chan,Kim Jung,Lee Kye-Sung,Hur Hwan,Nam Ki-Hwan,Kim Geon,Chang Ki

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Link

http://www.mdpi.com/1424-8220/17/12/2774/pdf

Reference19 articles.

1. CCD-based thermoreflectance microscopy: principles and applications

2. Theoretical and experimental investigation of the thermal resolution and dynamic range of CCD-based thermoreflectance imaging

3. Quantitative temperature measurement of multi-layered semiconductor devices using spectroscopic thermoreflectance microscopy

4. Noncontact transient temperature mapping of active electronic devices using the thermoreflectance method

5. Imaging setup for temperature, topography, and surface displacement measurements of microelectronic devices

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Noncontact Temperature Measurement of Metal Surfaces Using Reflected Laser Beam;Sensors and Materials;2024-08-16

2. Thermoreflectance-based thermometry of silicon thin films with resonantly enhanced temperature sensitivity;Optics Express;2023-12-22

3. Study of the mercury chalcogenide single crystals by means of a combination of laser pump-probe thermoreflectance technique with Fabry–Perot interferometer;Journal of Applied Physics;2023-05-22

4. Laser Pump‐Probe Fiber‐Optic Technique for Characterization of Near‐Surface Layers of Solids: Development and Application Prospects for Studying Semiconductors and Weyl Semimetals;Annalen der Physik;2020-06-18

5. Backside Thermal Fault Localization Using Laser Scanning Confocal Thermoreflectance Microscopy Based on Auto-Balanced Detection;IEEE Transactions on Instrumentation and Measurement;2020-06

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