Power Optimization of TiNiHf/Si Shape Memory Microactuators

Author:

Arivanandhan Gowtham1ORCID,Li Zixiong1,Curtis Sabrina M.23ORCID,Hanke Lisa2,Quandt Eckhard2,Kohl Manfred1ORCID

Affiliation:

1. Institute of Microstructure Technology, Karlsruhe Institute of Technology (KIT), 76131 Karlsruhe, Germany

2. Institute for Materials Science, Kiel University (CAU), 24143 Kiel, Germany

3. Materials Science and Engineering, University of Maryland, College Park, MD 20742, USA

Abstract

We present a novel design approach for the power optimization of cantilever-based shape memory alloy (SMA)/Si bimorph microactuators as well as their microfabrication and in situ characterization. A major concern upon the miniaturization of SMA/Si bimorph microactuators in conventional double-beam cantilever designs is that direct Joule heating generates a large size-dependent temperature gradient along the length of the cantilevers, which significantly enhances the critical electrical power required to complete phase transformation. We demonstrate that this disadvantage can be mitigated by the finite element simulation-assisted design of additional folded beams in the perpendicular direction to the active cantilever beams, resulting in temperature homogenization. This approach is investigated for TiNiHf/Si microactuators with a film thickness ratio of 440 nm/2 µm, cantilever beam length of 75–100 µm and widths of 3–5 µm. Temperature-homogenized SMA/Si microactuators show a reduction in power consumption of up to 48% compared to the conventional double-beam cantilever design.

Funder

German Research Foundation

Publisher

MDPI AG

Subject

Control and Optimization,Control and Systems Engineering

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. An analytical study on SMA beam-column actuators for anti-buckling phenomenon;International Journal of Solids and Structures;2024-06

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