Measurement of In-Plane Motions in MEMS

Abstract

We report a technique to measure in-plane and out-of-plane motions of MEMS using typical out-of-plane (single-axis) Laser Doppler Vibrometers (LDVs). The efficacy of the technique is demonstrated by evaluating the in-plane and out-of-plane modal response and frequency response of an interdigitated comb-drive actuator. We also investigate the validity of observing planar modes of vibration outside their dominant plane of motion and find that it leads to erroneous results. Planar modes must be evaluated in their plan of motion.