Affiliation:
1. State Key Laboratory of Photon-Technology in Western China Energy, International Collaborative Center on Photoelectric Technology and Nano Functional Materials, Institute of Photonics & Photon Technology, Northwest University, Xi’an 710127, China
Abstract
Multi-focal laser direct writing (LDW) based on phase-only spatial light modulation (SLM) can realize flexible and parallel nanofabrication with high-throughput potential. In this investigation, a novel approach of combining two-photon absorption, SLM, and vector path-guided by scalable vector graphics (SVGs), termed SVG-guided SLM LDW, was developed and preliminarily tested for fast, flexible, and parallel nanofabrication. Three laser focuses were independently controlled with different paths, which were optimized according to the SVG to improve fabrication and promote time efficiency. The minimum structure width could be as low as 81 nm. Accompanied by a translation stage, a carp structure of 18.10 μm × 24.56 μm was fabricated. This method shows the possibility of developing LDW techniques toward fully electrical systems, and provides a potential way to efficiently engrave complex structures on nanoscales.
Funder
National Major Scientific Research Instrument Development Project of China
The National Natural Science Foundation of China
Science and Technology Innovation Team Project of Shaanxi Province
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Cited by
3 articles.
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