Recent progress in multiphoton microfabrication
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference100 articles.
1. Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching
2. Fabrication of three-dimensional microstructure using maskless gray-scale lithography
3. Moving mask UV lithography for three-dimensional structuring
4. Three-dimensional microfabrication with two-photon-absorbed photopolymerization
5. Finer features for functional microdevices
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