Affiliation:
1. Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
2. University of Chinese Academy of Sciences, Beijing 101408, China
Abstract
Non-recessed ohmic contact resistance (Rc) on ultrathin-barrier (UTB) AlGaN(<6 nm)/GaN heterostructure was effectively reduced to a low value of 0.16 Ω·mm. The method called the ‘ohmic-before-passivation’ process was adopted to eliminate the effects of fluorine plasma etching, in which an alloyed Ti/Al/Ni/Au ohmic metal stack was formed prior to passivation. The recovery of 2-D Electron Gas (2DEG) adjacent to the ohmic contact was enhanced by composite double-layer dielectric with AlN/SiNx passivation. It is found that the separation between the recovered 2DEG and the ohmic contacting edge can be remarkably reduced, contributing to a reduced transfer length (LT) and low Rc, as compared to that of ohmic contact to the AlGaN(~20 nm)/GaN heterostructure with a pre-ohmic recess process. Thermionic field emission is verified to be the dominant ohmic contact mechanism by temperature-dependent current-voltage measurements. The low on-resistance of 3.9 Ω·mm and the maximum current density of 750 mA/mm with Vg = 3 V were achieved on the devices with the optimized ohmic contact. The non-recessed ohmic contact with the ‘ohmic-before-passivation’ process is a promising strategy to optimize the performance of low-voltage GaN-based power devices.
Funder
National Key Research and Development Program of China
CAS-Croucher Funding Scheme
National Natural Science Foundation of China
Beijing Municipal Science and Technology Commission
Subject
Electrical and Electronic Engineering,Computer Networks and Communications,Hardware and Architecture,Signal Processing,Control and Systems Engineering
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