Highly Sensitive Sensor Structure Based on Sol-Gel Waveguide Films and Grating Couplers

Abstract

The technologies of optical planar evanescent wave chemical and biochemical sensors require chemically resistant, high refractive index waveguide films having very good optical transmission properties. In this paper we present such two-compound SiOx:TiOy waveguide films fabricated by using the sol-gel method and the dip-coating technique. These films not only have high optical quality and low propagation losses but also an extremely high refractive index of >1.90 (λ = 632.8 nm). Further we demonstrate efficient and simple sensing structures, designed and fabricated based on these films. For this purpose, grating couplers with a period of Λ = 417 nm were fabricated on the interface between a waveguide film and cover using the single-step nanoimprint method. These sensing structures were tested as planar refractometers. The results of the theoretical analysis on the basis of which the structures were designed as well as results of their experimental characterization are presented in this work. Consequently, the relationship between parameters and the sensitivity of investigated sensing structures is discussed. As a result, the profitable properties of the designed grating coupler sensors are verified and excellent consistency between the results of the theoretical analysis and experimental results is achieved.