GisaxStudio—An Open Platform for Analysis and Simulation of GISAXS from 3D Nanoparticle Lattices

Abstract

Grazing-incidence small-angle X-ray scattering (GISAXS) is a powerful method for the structural analysis of ordered arrays of nanoparticles, quantum dots, or similar objects. However, for the correct interpretation of the measured GISAXS intensity distributions, a proper data analysis, including a suitable model, is required. Here, we demonstrate a software platform, GisaxStudio, aimed at the analysis and simulation of 2D GISAXS intensity distributions from ordered lattices of different nanoparticles. It contains several models that satisfactorily describe the GISAXS from 3D lattices or crystals of nanoparticles prepared by the self-assembly processes, pre-pattering, or ion-beam interaction with the material within their tracks. It also supports different shapes of nanoparticles, including core-shell structure with the center of core possibly displaced from the center of the shell. The software is very useful for fast and accurate GISAXS data analysis.