Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements
Author:
Affiliation:
1. Institute of Chemistry, Technology and Metallurgy (ICTM), National Institute of the Republic of Serbia, University of Belgrade, Njegoševa 12, 11000 Belgrade, Serbia
Publisher
MDPI
Link
https://www.mdpi.com/2673-4591/58/1/52/pdf
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3. Zhang, J., Chen, J., Li, M., Ge, Y., Wang, T., Shan, P., and Mao, X. (2018). Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System. Micromachines, 9.
4. Experimental determination of silicon pressure sensor diaphragm deflection;Sens. Actuators,1990
5. Investigation of impurity distribution for pressure sensor piezoresistors;Totovski;J. Serb. Chem. Soc.,1993
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