Design and Analysis of a Novel 2-DOF Rotation–Translation Precision Positioning Stage

Abstract

This paper presents the design, modeling, simulation, and experimental testing of a novel 2-DOF precision micro-positioning stage. A compact parallel structure is proposed and the rotation stroke of the stage is improved by reducing the rotation radius. Compared with other positioning stages, the developed stage has the advantage of large rotation stroke, compact structure, and high resonant frequency, and it can realize various positioning functions with fewer piezoelectric actuators. The simplified flexibility equation of the composite bridge mechanism was obtained through the equivalent replacement of the composite hinge, and then the transmission ratio and input stiffness analysis model of the stage are further established. Then, the simulation and experiment verify the accuracy of the model. The significant size parameters of the stage are determined according to the sensitivity analysis and verified by FEA. To decouple the rotation and translation, we establish the scale factor. The experimental results reveal that the workspace of the stage is 22.90 mrad × 95.03 μm. The step response time is 80 ms and the rotation resolution is 5 μrad under open-loop control.