1. School of Information and Communication Engineering, North University of China, Taiyuan 030051, China
2. Center for Microsystem Integration, North University of China, Taiyuan 030051, China
3. School of Instrument and Intelligent Future Technology, North University of China, Taiyuan 030051, China
4. Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China
5. School of Semiconductors and Physics, North University of China, Taiyuan 030051, China