1. SDU NanoSYD, Mads Clausen Institute, University of Southern Denmark, Alsion 2, 6400 Sønderborg, Denmark
2. SDU Mechatronics, Department of Mechanical and Electrical Engineering, University of Southern Denmark, Alsion 2, 6400 Sønderborg, Denmark
3. AmiNIC ApS, Jernbanegade 75, 5500 Middlefart, Denmark
4. Fraunhofer Institute for Silicon Technology, Fraunhoferstraße 1, 25524 Itzehoe, Germany