Experiments with Femtosecond Laser on Monocrystalline Silicon-Reference-Cited by-同舟云学术

Experiments with Femtosecond Laser on Monocrystalline Silicon

Published:2020-10-01 Issue:2 Volume:3 Page:86-89
ISSN:2601-8799
Container-title:Acta Materialia Transylvanica
language:en
Short-container-title:

Author:

Maloveczky Anna¹,Windisch Márk¹,Szabó Dávid¹,Buza Gábor¹,Ugi Dávid²,Veres Miklós³,Rigó István³,Fürjes Péter⁴,Hakkel Orsolya⁴

Affiliation:

1. Bay Zoltán Nonprofit Ltd. for Applied Research . Budapest , Hungary

2. Eötvös Loránd University . Budapest , Hungary

3. Wigner Research Centre for Physics . Budapest , Hungary

4. Centre for Energy Research . Budapest , Hungary

Abstract

Abstract Experiments were performed with femtosecond laser on monocrystalline silicon for different application fields. The small focal spot diameter, the ultra-short pulse length, and the high energy density opens new ways in material processing; the treated material will have smaller heat affected zone (HAZ), and allow more precise, higher quality material processing. Micropillars and LIPSS structures were prepared on monocrystalline silicon in our study.

Publisher

Acta Materialia Transylvanica

Link

https://www.sciendo.com/pdf/10.33924/amt-2020-02-06

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