Micromachining along a curve: Femtosecond laser micromachining of curved profiles in diamond and silicon using accelerating beams
Author:
Affiliation:
1. Département d’Optique P.M. Duffieux, Institut FEMTO-ST, UMR 6174 CNRS Université de Franche-Comté, 25030 Besançon Cedex, France
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Reference22 articles.
1. C. R. Phipps, Laser Ablation and its Applications (Springer, New York, 2007).
2. Machining of sub-micron holes using a femtosecond laser at 800 nm
3. Femtosecond laser micromachining in transparent materials
4. High aspect ratio nanochannel machining using single shot femtosecond Bessel beams
5. Microdrilling of metals with an inexpensive and compact ultra-short-pulse fiber amplified microchip laser
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