A study on optical, morphological and mechanical properties of Al<SUB align="right">2O<SUB align="right">3 ultra-thin films deposited by RF reactive magnetron sputtering-Reference-Cited by-同舟云学术

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A study on optical, morphological and mechanical properties of Al_{2O_{3 ultra-thin films deposited by RF reactive magnetron sputtering}}

Published:2015 Issue:5 Volume:9 Page:415
ISSN:1749-785X
Container-title:International Journal of Surface Science and Engineering
language:en
Short-container-title:IJSURFSE

Author:

Pat Suat,Özen Soner,Şenay Volkan,Aydoğmuş Tuna,Elmas Saliha,Korkmaz Şadan,Ekem Naci,Balbağ M. Zafer

Publisher

Inderscience Publishers

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Study Corrosion Properties by Magnetron Sputtered Nanocrystalline Al2o3 Thin Films;EGYPT J CHEM;2022

2. Designing hard, low-refractive-index lossy materials for super wear-resistant absorbers;Materials Research Letters;2022-04-14

3. A STUDY CORROSION PROPERTIES BY MAGNETRON SPUTTERED NANOCRYSTALLINE Al2O3 THIN FILMS;Egyptian Journal of Chemistry;2022-03-29

4. The Al doping effect on the surface, optical, electrical and nanomechanical properties of the ZnO and AZO thin films prepared by RF sputtering technique;Vacuum;2017-07

5. A new technique for transparent solid state Li3PO4 electrolyte layer growth: thermionic vacuum arc technique;Journal of Materials Science: Materials in Electronics;2017-04-21

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