The Al doping effect on the surface, optical, electrical and nanomechanical properties of the ZnO and AZO thin films prepared by RF sputtering technique-Reference-Cited by-同舟云学术

The Al doping effect on the surface, optical, electrical and nanomechanical properties of the ZnO and AZO thin films prepared by RF sputtering technique

Published:2017-07 Issue: Volume:141 Page:210-215
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Pat Suat,Mohammadigharehbagh Reza,Özen Soner,Şenay Volkan,Yudar H. Hakan,Korkmaz Şadan

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

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