Optoelectrical properties extraction using spectroscopic ellipsometry, in case of AZO thin films deposited by DC reactive sputtering in various oxygen concentration-Reference-Cited by-同舟云学术

Optoelectrical properties extraction using spectroscopic ellipsometry, in case of AZO thin films deposited by DC reactive sputtering in various oxygen concentration

Published:2023-06 Issue:16 Volume:34 Page:
ISSN:0957-4522
Container-title:Journal of Materials Science: Materials in Electronics
language:en
Short-container-title:J Mater Sci: Mater Electron

Author:

Dib Taoufik^ORCID,Birouk Boubekeur

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

https://link.springer.com/content/pdf/10.1007/s10854-023-10717-y.pdf

Reference33 articles.

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5. J.K. Jeong et al., Investigation of atomic-layer-deposited Al-doped ZnO film for AZO/ZnO double-stacked active layer thin-film transistor application. Thin Solid Films 638, 89–95 (2017). https://doi.org/10.1016/J.TSF.2017.07.034