Deep Learning, Feature Learning, and Clustering Analysis for SEM Image Classification

Abstract

In this paper, we report upon our recent work aimed at improving and adapting machine learning algorithms to automatically classify nanoscience images acquired by the Scanning Electron Microscope (SEM). This is done by coupling supervised and unsupervised learning approaches. We first investigate supervised learning on a ten-category data set of images and compare the performance of the different models in terms of training accuracy. Then, we reduce the dimensionality of the features through autoencoders to perform unsupervised learning on a subset of images in a selected range of scales (from 1 μm to 2 μm). Finally, we compare different clustering methods to uncover intrinsic structures in the images.