In situspectroscopic ellipsometry as a sensor for hard coatings and steel nitriding-Reference-Cited by-同舟云学术

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In situspectroscopic ellipsometry as a sensor for hard coatings and steel nitriding

Published:2002-08 Issue:1 Volume:34 Page:681-685
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Bonanni A.,Stifter D.,Hingerl K.,Störi H.,Werner W. S. M.,Brenner J.,Weithaler C.,Gruska B.,Prunel G.,Delaire V.,Sanvito T.

Funder

EC

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference18 articles.

1. TiNx coatings prepared by d.c. reactive magnetron sputtering

2. Ti(C,N) coatings using the arc process

3. Interrelationship between processing, coatingproperties and functional properties of steered arc physically vapour deposited (Ti,AI)N and (Ti,Nb)N coatings

4. Ellipsometry and polarized light

5. Ti/TiN multilayers for hard coatings applications: in-situ characterization by real time spectroscopic ellipsometry

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ellipsometric characterization of CrTiAlN coating deposited at low temperatures by unbalanced magnetron sputtering;Journal of Physics: Conference Series;2020-04-01

2. CCD camera-based analysis of thin film growth in industrial PACVD processes;SPIE Proceedings;2013-05-13

3. In situ spectroscopic ellipsometry of MOCVD-grown GaN compounds for on-line composition determination and growth control;Journal of Crystal Growth;2003-02

4. Virtual interface approximation model applied to spectroscopic ellipsometry for on-line composition determination of metalorganic chemical vapor deposition grown ternary nitrides;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2003

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