57‐2: High performance LTPS TFT Backplane Using Blue Laser Diode Annealing for Mini/Micro LED Display-Reference-Cited by-同舟云学术

57‐2: High performance LTPS TFT Backplane Using Blue Laser Diode Annealing for Mini/Micro LED Display

Published:2024-04 Issue:S1 Volume:55 Page:494-496
ISSN:0097-966X
Container-title:SID Symposium Digest of Technical Papers
language:en
Short-container-title:Symp Digest of Tech Papers

Author:

Zhu Dongsheng¹,Shi Jinming¹,Li Chongyang¹,Liu Nian¹,Li Jinming¹,Zhao Rui¹,Yao Jiangbo¹,Yang Yingbao²,Kinoshita Masahiro²,Gotoh Jun²,Shigeto Sugimoto²

Affiliation:

1. Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd Shenzhen China 518132

2. V Technology Co., Ltd Japan 240-0005

Abstract

In this paper, BLDA technology has been applied to realize the preparation of a LTPS TFT without ion implantation. The BLDA LTPS TFT gives the advantages of high mobility (~ 290.5 cm2/Vs), a smaller subthreshold voltage swing, kink‐free output curve, and excellent device stability under PBTS. The backplane technology has been successfully applied in 7.1‐inch Mini‐LED display products, and the lighting effect is uniform. This low‐cost technique is very suitable for the LTPS TFT backplane for large area, high resolution Mini/Micro LED displays.

Publisher

Wiley

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