Numerical simulation of multiple polysilicon CVD reactors connected in series using CFD method
Author:
Affiliation:
1. Department of Chemical Engineering; School of Chemical Engineering and Technology; Xi'an Jiaotong University; Xi'an Shaanxi 710049 P. R. China
2. State Key Laboratory of Chemical Engineering; Tianjin University; Tianjin 300072 China
Funder
National Natural Science Foundation of China
National Basic Research Program of China
Publisher
Wiley
Subject
General Chemical Engineering
Reference39 articles.
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