Author:
Mathé E. L.,Desoyer J. C.
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
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3. 2 MeV aluminum implantation into silicon: radiation damage;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03
4. Diffusion and Electrical Behavior of Al Implanted into Capped Si;Journal of The Electrochemical Society;1993-07-01
5. High energy implants of aluminum in Czochralski and floating zone grown silicon substrates;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-04