Author:
Schmalz K.,Kirscht F.-G.,Niese S.,Richter H.,Kittler M.,Seifert W.,Babanskaya I.,Klose H.,Tittelbach-Helmrich K.,Schöneich J.
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. and , Solid State Technol. No. 3, 103 (1985).
2. Gettering of Metallic Impurities in Silicon
3. A Model That Describes the Role of Oxygen, Carbon, and Silicon Interstitials in Silicon Wafers During Device Processing
4. Proc. Gettering and Defect Engineering in the Semiconductor Technology—GADEST '85, Ed. Acad. Sci. GDR, Frankfürt (O) 1985 (p. 1).
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