Author:
Sobeslavsky E.,Skorupa W.
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
8 articles.
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1. SOI Materials;Silicon-on-Insulator Technology: Materials to VLSI;1997
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3. Modelling of the formation of buried dielectric layers by ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-03
4. Ion beam synthesis of Si3N4 amorphous buried layers;Materials Science and Engineering: B;1992-01
5. TEM study of combined oxygen and nitrogen implanted silicon;Philosophical Magazine A;1991-09