Theory of the recoil implantation-Reference-Cited by-同舟云学术

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Theory of the recoil implantation

Published:1989-12-16 Issue:2 Volume:116 Page:555-560
ISSN:0031-8965
Container-title:Physica Status Solidi (a)
language:de
Short-container-title:Phys. Stat. Sol. (a)

Author:

Blinov Yu. F.,Serba P. V.

Publisher

Wiley

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Residual defects in Si produced by recoil implantation of oxygen

2. Recoil implantation from a thin source

3. Recoil implantation from a thick film source

4. Theory of implantation recoil atoms

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. RADIATION DEFECT ENGINEERING;International Journal of High Speed Electronics and Systems;2005-03

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