Author:
Mukashev B. N.,Kusainov Zh. A.,Nusupov K. Kh.,Tokmoldin S. Zh.
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference16 articles.
1. in: Application of Ion Beams to Materials 1975, Inst. of Phys., London/Bristol 1976 (p. 37).
2. and , in: Ion Implantation in Semiconductors 1976, Plenum Press, New York/London 1978 (p. 375).
3. Low-energy antimony implantation in silicon
4. Low-energy antimony implantation in silicon
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