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Hydrogen Depth Profiling by Elastic Recoil Detection

Published:1989-04-16 Issue:2 Volume:112 Page:781-784
ISSN:0031-8965
Container-title:Physica Status Solidi (a)
language:de
Short-container-title:Phys. Stat. Sol. (a)

Author:

Ilkhamov R. A.,Ho Li Jen,Khusmurodov S. S.,Machajdik D.,Osetinskij G. M.,Pajek M.,Sandrik R.,Shirokov D. M.

Publisher

Wiley

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. New precision technique for measuring the concentration versus depth of hydrogen in solids

2. Depth profiling of hydrogen by detection of recoiled protons

3. Depth resolution and recoil cross section for analyzing hydrogen in solids using elastic recoil detection with 4He beam

4. Computer simulation of helium-induced forward-recoil proton spectra for hydrogen concentration determinations

5. High sensitivity hydrogen analysis using elastic recoil

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Application of the ERD method for hydrogen determination in silicon (oxy) nitride thin films prepared by ECR plasma deposition;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03

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