Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition

Author:

Charvot Jaroslav1ORCID,Pokorný Daniel1,Zazpe Raul23ORCID,Krumpolec Richard4ORCID,Pavliňák David4ORCID,Hromádko Luděk23ORCID,Přikryl Jan2ORCID,Rodriguez‐Pereira Jhonatan2ORCID,Klikar Milan1ORCID,Jelínková Veronika5,Macak Jan M.23ORCID,Bureš Filip1ORCID

Affiliation:

1. Institute of Organic Chemistry and Technology Faculty of Chemical TechnologyUniversity of Pardubice Studentská 573 Pardubice Czech Republic

2. Center of Materials and Nanotechnologies Faculty of Chemical TechnologyUniversity of Pardubice Nám. Čs. Legií 565 53002 Pardubice Czech Republic

3. Central European Institute of TechnologyBrno University of Technology Purkyňova 123 61200 Brno Czech Republic

4. R & D Center for Low-Cost Plasma and Nanotechnology Surface Modifications Department of Physical ElectronicsFaculty of Science Kotlářská 267/2 611 37 Brno Czech Republic

5. The Institute of Technology and Business in České Budějovice Okružní 517/10 370 01 České Budějovice Czech Republic

Publisher

Wiley

Subject

General Chemistry

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