Growth of Copper Films by Metal Organic Vapor Deposition Using (Pyrazolylborate)copper(I) Compounds-Reference-Cited by-同舟云学术

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Growth of Copper Films by Metal Organic Vapor Deposition Using (Pyrazolylborate)copper(I) Compounds

Published:1997-02 Issue:1 Volume:3 Page:37-43
ISSN:0948-1907
Container-title:Chemical Vapor Deposition
language:en
Short-container-title:Chem. Vap. Deposition

Author:

Plappert Elisabeth-Charlotte,Stumm Thomas,van den Bergh Herbert,Hauert Roland,Dahmen Klaus-Hermann

Publisher

Wiley

Subject

Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry

Reference34 articles.

1. Inlaid Copper Multilevel Interconnections Using Planarization by Chemical-Mechanical Polishing

2. Chemical Vapor Deposition of Copper for Multilevel Metallization

3. Copper Etching: New Chemical Approaches

4. Manufacturability Versus Reliability Issues Relevant to Interconnect Metallizations.

5. Reduction of Electromigration in Aluminum Films by Copper Doping

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. In Vitro and in Vivo Anticancer Activity of Copper(I) Complexes with Homoscorpionate Tridentate Tris(pyrazolyl)borate and Auxiliary Monodentate Phosphine Ligands;Journal of Medicinal Chemistry;2014-05-15

2. Chemistry of Cu(acac)2 on Ni(110) and Cu(110) surfaces: Implications for atomic layer deposition processes;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2013-01

3. Metallic Materials Deposition: Metal-Organic PrecursorsBased in part on the article Metallic Materials Deposition: Metal-Organic Precursors by Herbert D. Kaesz, Alfred Zinn, & Lutz Brandt which appeared in theEncyclopedia of Inorganic Chemistry, First Edition.;Encyclopedia of Inorganic and Bioinorganic Chemistry;2011-12-15

4. Scorpionates bearing nitro substituents: mono-, bis- and tris-(3-nitro-pyrazol-1-yl)borate ligands and their copper(i) complexes;Dalton Transactions;2010

5. Copper(I) Isocyanide and Phosphane Complexes of Fluorinated Mono‐ and Bis(pyrazolyl)borates;European Journal of Inorganic Chemistry;2009-08-31

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