Quantitative determination of electric field strengths within dynamically operated devices using EBIC analysis in the SEM-Reference-Cited by-同舟云学术

Quantitative determination of electric field strengths within dynamically operated devices using EBIC analysis in the SEM

Published:2008-06-03 Issue:4 Volume:30 Page:324-330
ISSN:0161-0457
Container-title:Scanning
language:en
Short-container-title:Scanning

Author:

Pugatschow Anton,Heiderhoff Ralf,Balk Ludwig J.

Publisher

Wiley

Subject

Instrumentation,Atomic and Molecular Physics, and Optics

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/sca.20109/fullpdf

Reference25 articles.

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2. Time-resolved optical beam-induced current method;Bergner;Microelectron Eng,1990

3. Avalanche multiplication of electron-beam generated carriers in a silicon p-n junction;Donolato;J Appl Phys,1977

4. On the analysis of diffusion length measurements by SEM;Donolato;Solid State Electron,1982

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