Black Silicon With Ultra-Low Surface Recombination Velocity Fabricated by Inductively Coupled Power Plasma
Author:
Affiliation:
1. Department of Micro- and Nanotechnology; Technical University of Denmark; Building 345C, DK-2800 Kgs. Lyngby Denmark
Funder
EUDP
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssr.201800477/fullpdf
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