Alkyltin Keggin Clusters Templated by Sodium

Author:

Saha Sumit12,Park Deok‐Hie12ORCID,Hutchison Danielle C.12ORCID,Olsen Morgan R.12,Zakharov Lev N.13,Marsh David34,Goberna‐Ferrón Sara15,Frederick Ryan T.6ORCID,Diulus J. Trey6,Kenane Nizan12,Herman Gregory S.6ORCID,Johnson Darren W.3ORCID,Keszler Douglas A.12,Nyman May12ORCID

Affiliation:

1. Center for Sustainable Materials Chemistry (CSMC) Oregon State University USA

2. Department of Chemistry Oregon State University USA

3. Department of Chemistry and Biochemistry University of Oregon Eugene OR 97403 USA

4. Current address: Dept. of Chemistry Alfred University Alfred NY 14802 USA

5. Current address: ESRF-The European Synchrotron 380000 Grenoble France

6. Department of Chemical, Biological & Environmental Engineering Oregon State University Corvallis OR 97331 USA

Funder

National Science Foundation

Semiconductor Research Corporation

Publisher

Wiley

Subject

General Chemistry,Catalysis

Reference34 articles.

1. Mainstreaming inorganic metal-oxide resists for high-resolution lithography

2. D. D. Simone M. Mao M. Kocsis P. De Schepper F. Lazzarino G. Vandenberghe J. Stowers S. Meyers B. L. Clark A. Grenville V. Luong F. Yamashita D. Parnell Proc. SPIE 9776 Extreme Ultraviolet (EUV) Lithography VII 2016 97760B.

3. J. Stowers J. Anderson B. Cardineau B. Clark P. De Schepper J. Edson M. Greer K. Jiang M. Kocsis S. Meyers A. Telecky A. Grenville D. De Simone W. Gillijns G. Vandenberghe Proc. SPIE 9779 Advances in Patterning Materials and Processes XXXIII 2016 977904.

4. Chemical and Structural Investigation of High-Resolution Patterning with HafSOx

5. J. M. Amador S. R. Decker S. E. Lucchini R. E. Ruther D. A. Keszler Proc. of SPIE.2014 9051 90511A 1–6.

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