A computer experiment application to the design and optimization of a capacitive accelerometer-Reference-Cited by-同舟云学术

A computer experiment application to the design and optimization of a capacitive accelerometer

Published:2009-03 Issue:2 Volume:25 Page:151-162
ISSN:1524-1904
Container-title:Applied Stochastic Models in Business and Industry
language:en
Short-container-title:Appl. Stochastic Models Bus. Ind.

Author:

Alvarez M. J.,Gil-Negrete N.,Ilzarbe L.,Tanco M.,Viles E.,Asensio A.

Publisher

Wiley

Subject

Management Science and Operations Research,General Business, Management and Accounting,Modeling and Simulation

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/asmb.737/fullpdf

Reference17 articles.

1. Design steps for bulk micro machined single axis silicon capacitive accelerometer with optimised device dimensions;Agarwal;Journal of Physics: Conference Series,2006

2. System modelling of microaccelerometer using piezoelectric thin films;Yu;Sensors and Actuators A,2001

3. Extremely miniaturized capacitive movement sensors using new suspension systems;Puers;Sensors and Actuators A,1994

4. Structural parameter sensitivity analysis of cantilever- and bridge-type accelerometers;Kóvacs;Sensors and Actuators A,2001

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