Synthesis of Calcium(II) Amidinate Precursors for Atomic Layer Deposition through a Redox Reaction between Calcium and Amidines
Author:
Affiliation:
1. Department of Chemistry and Chemical Biology Harvard University 12 Oxford Street Cambridge MA 02138 USA
2. Department of Chemistry Texas A&M University College Station TX 77843-3255 USA
Funder
National Science Foundation
Publisher
Wiley
Subject
General Medicine
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/ange.201602406
Reference55 articles.
1. Atomic layer deposition of CaB2O4 films using bis(tris(pyrazolyl)borate)calcium as a highly thermally stable boron and calcium source
2. Barrier layer mechanism engineering in calcium copper titanate thin film capacitors through microstructure control
3. Chemical vapour deposition of high-Tcsuperconducting thin films
4. Growth of La1−xCaxMnO3thin films by atomic layer deposition
5. Atomic layer deposition of calcium oxide and calcium hafnium oxide films using calcium cyclopentadienyl precursor
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