Direct and Transmission Milling of Suspended Silicon Nitride Membranes With a Focused Helium Ion Beam
Author:
Affiliation:
1. Joint School of Nanoscience and Nanoengineering; University of North Carolina Greensboro; Greensboro; North Carolina
2. Carl Zeiss NTS; LLC; Peabody; Massachusetts
Publisher
Wiley
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
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