1. Department of Microelectronic Science and Engineering School of Physical Science and Technology Ningbo University Ningbo 315211 P. R. China
2. State Key Laboratory of Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences Beijing 100083 P. R. China
3. State Key Laboratory of Functional Materials for Informatics Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 P. R. China
4. School of Microelectronics Shandong University Jinan 250100 P. R. China